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Narrower Nanoribbon Biosensors Fabricated by Chemical Lift-Off Lithography Show Higher Sensitivity

Wafer-scale nanoribbon field-effect transistor (FET) biosensors fabricated by straightforward top-down processes are demonstrated as sensing platforms with high sensitivity to a broad range of biological targets. Nanoribbons with 350-nm widths (700-nm pitch) were patterned by chemical lift-off litho...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Veröffentlicht in:ACS Nano
Hauptverfasser: Zhao, Chuanzhen, Liu, Qingzhou, Cheung, Kevin M., Liu, Wenfei, Yang, Qing, Xu, Xiaobin, Man, Tianxing, Weiss, Paul S., Zhou, Chongwu, Andrews, Anne M.
Format: Artigo
Sprache:Inglês
Veröffentlicht: 2020
Schlagworte:
Online Zugang:https://ncbi.nlm.nih.gov/pmc/articles/PMC7855841/
https://ncbi.nlm.nih.gov/pubmed/33337135
https://ncbi.nlm.nih.govhttp://dx.doi.org/10.1021/acsnano.0c07503
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