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Fabrication of Three-Dimensional Microvalves of Internal Nested Structures Inside Fused Silica
Nested structures inside the hard material play a pivotal role in the microfluidics systems, such as the microvalve and the micropump. In this article, we demonstrate a novel and facile method of fabricating nested structures inside the fused silica with a two-step process femtosecond laser wet etch...
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| 出版年: | Micromachines (Basel) |
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| 主要な著者: | , , , , |
| フォーマット: | Artigo |
| 言語: | Inglês |
| 出版事項: |
MDPI
2021
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| 主題: | |
| オンライン・アクセス: | https://ncbi.nlm.nih.gov/pmc/articles/PMC7823354/ https://ncbi.nlm.nih.gov/pubmed/33401435 https://ncbi.nlm.nih.govhttp://dx.doi.org/10.3390/mi12010043 |
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