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Fabrication of Three-Dimensional Microvalves of Internal Nested Structures Inside Fused Silica

Nested structures inside the hard material play a pivotal role in the microfluidics systems, such as the microvalve and the micropump. In this article, we demonstrate a novel and facile method of fabricating nested structures inside the fused silica with a two-step process femtosecond laser wet etch...

詳細記述

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書誌詳細
出版年:Micromachines (Basel)
主要な著者: Shan, Chao, Yang, Qing, Bian, Hao, Hou, Xun, Chen, Feng
フォーマット: Artigo
言語:Inglês
出版事項: MDPI 2021
主題:
オンライン・アクセス:https://ncbi.nlm.nih.gov/pmc/articles/PMC7823354/
https://ncbi.nlm.nih.gov/pubmed/33401435
https://ncbi.nlm.nih.govhttp://dx.doi.org/10.3390/mi12010043
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