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Catalyst-Less and Transfer-Less Synthesis of Graphene on Si(100) Using Direct Microwave Plasma Enhanced Chemical Vapor Deposition and Protective Enclosures

In this study, graphene was synthesized on the Si(100) substrates via the use of direct microwave plasma-enhanced chemical vapor deposition (PECVD). Protective enclosures were applied to prevent excessive plasma etching of the growing graphene. The properties of synthesized graphene were investigate...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Veröffentlicht in:Materials (Basel)
Hauptverfasser: Gudaitis, Rimantas, Lazauskas, Algirdas, Jankauskas, Šarūnas, Meškinis, Šarūnas
Format: Artigo
Sprache:Inglês
Veröffentlicht: MDPI 2020
Schlagworte:
Online Zugang:https://ncbi.nlm.nih.gov/pmc/articles/PMC7763619/
https://ncbi.nlm.nih.gov/pubmed/33321771
https://ncbi.nlm.nih.govhttp://dx.doi.org/10.3390/ma13245630
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