Multiscale simulation of the focused electron beam induced deposition process

Focused electron beam induced deposition (FEBID) is a powerful technique for 3D-printing of complex nanodevices. However, for resolutions below 10 nm, it struggles to control size, morphology and composition of the structures, due to a lack of molecular-level understanding of the underlying irradiat...

Popoln opis

Shranjeno v:
Bibliografske podrobnosti
izdano v:Sci Rep
Main Authors: de Vera, Pablo, Azzolini, Martina, Sushko, Gennady, Abril, Isabel, Garcia-Molina, Rafael, Dapor, Maurizio, Solov’yov, Ilia A., Solov’yov, Andrey V.
Format: Artigo
Jezik:Inglês
Izdano: Nature Publishing Group UK 2020
Teme:
Article
Online dostop:https://ncbi.nlm.nih.gov/pmc/articles/PMC7705715/
https://ncbi.nlm.nih.gov/pubmed/33257728
https://ncbi.nlm.nih.govhttp://dx.doi.org/10.1038/s41598-020-77120-z
Oznake: Označite
Brez oznak, prvi označite!

Podobne knjige/članki