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Micro Electrochemical Milling of Micro Metal Parts with Rotating Ultrasonic Electrode
With the rapid development of MEMS, the demand for metal microstructure is increasing. Micro electrochemical milling technology (MECM) is capable of manufacturing micro metallic devices or components based on the principle of electrochemical anode dissolution. To improve the capacity of MECM, this p...
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| Publicat a: | Sensors (Basel) |
|---|---|
| Autors principals: | , , , , , |
| Format: | Artigo |
| Idioma: | Inglês |
| Publicat: |
MDPI
2020
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| Matèries: | |
| Accés en línia: | https://ncbi.nlm.nih.gov/pmc/articles/PMC7699155/ https://ncbi.nlm.nih.gov/pubmed/33227991 https://ncbi.nlm.nih.govhttp://dx.doi.org/10.3390/s20226617 |
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