Automated Nanoscale Absolute Accuracy Alignment System for Transfer Printing

[Image: see text] The heterogeneous integration of micro- and nanoscale devices with on-chip circuits and waveguide platforms is a key enabling technology, with wide-ranging applications in areas including telecommunications, quantum information processing, and sensing. Pick and place integration wi...

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Bibliografiset tiedot
Julkaisussa:ACS Appl Nano Mater
Päätekijät: McPhillimy, John, Jevtics, Dimitars, Guilhabert, Benoit J. E., Klitis, Charalambos, Hurtado, Antonio, Sorel, Marc, Dawson, Martin D., Strain, Michael J.
Aineistotyyppi: Artigo
Kieli:Inglês
Julkaistu: American Chemical Society 2020
Linkit:https://ncbi.nlm.nih.gov/pmc/articles/PMC7590505/
https://ncbi.nlm.nih.gov/pubmed/33134883
https://ncbi.nlm.nih.govhttp://dx.doi.org/10.1021/acsanm.0c02224
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