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Reaction of BCl(3) with H- and Cl-terminated Si(1 0 0) as a pathway for selective, monolayer doping through wet chemistry
The reaction of boron trichloride with the H and Cl-terminated Si(100) surfaces was investigated to understand the interaction of this molecule with the surface for designing wet-chemistry based silicon surface doping processes using a carbon- and oxygen-free precursor. The process was followed with...
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| Publicado no: | Appl Surf Sci |
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| Main Authors: | , , , , |
| Formato: | Artigo |
| Idioma: | Inglês |
| Publicado em: |
2020
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| Assuntos: | |
| Acesso em linha: | https://ncbi.nlm.nih.gov/pmc/articles/PMC7583461/ https://ncbi.nlm.nih.gov/pubmed/33100450 https://ncbi.nlm.nih.govhttp://dx.doi.org/10.1016/j.apsusc.2020.146907 |
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