Shi, Z., Jefimovs, K., Romano, L., & Stampanoni, M. (2020). Towards the Fabrication of High-Aspect-Ratio Silicon Gratings by Deep Reactive Ion Etching. Micromachines (Basel).
Citação norma ChicagoShi, Zhitian, Konstantins Jefimovs, Lucia Romano, and Marco Stampanoni. "Towards the Fabrication of High-Aspect-Ratio Silicon Gratings By Deep Reactive Ion Etching." Micromachines (Basel) 2020.
Citação norma MLAShi, Zhitian, Konstantins Jefimovs, Lucia Romano, and Marco Stampanoni. "Towards the Fabrication of High-Aspect-Ratio Silicon Gratings By Deep Reactive Ion Etching." Micromachines (Basel) 2020.
Nota: a formatação da citação pode não corresponder 100% ao definido pela respectiva norma.