Shi, Z., Jefimovs, K., Romano, L., & Stampanoni, M. (2020). Towards the Fabrication of High-Aspect-Ratio Silicon Gratings by Deep Reactive Ion Etching. Micromachines (Basel).
Chicago Stili AlıntıShi, Zhitian, Konstantins Jefimovs, Lucia Romano, ve Marco Stampanoni. "Towards the Fabrication of High-Aspect-Ratio Silicon Gratings By Deep Reactive Ion Etching." Micromachines (Basel) 2020.
MLA AlıntıShi, Zhitian, Konstantins Jefimovs, Lucia Romano, ve Marco Stampanoni. "Towards the Fabrication of High-Aspect-Ratio Silicon Gratings By Deep Reactive Ion Etching." Micromachines (Basel) 2020.
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