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Tailoring Artificial Mode to Enable Cofired Integration of Shear‐type Piezoelectric Devices

Low‐temperature cofired ceramic technology is the prerequisite for producing advanced integrated piezoelectric devices that enable modern micro‐electromechanical systems because of merits such as high level of compactness and ultralow drive voltage. However, piezoceramic structure with shear‐type ou...

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Detalhes bibliográficos
Publicado no:Adv Sci (Weinh)
Main Authors: Yang, Jikun, Huan, Qiang, Yu, Yang, Wu, Jingen, Chu, Zhaoqiang, PourhosseiniAsl, MohammadJavad, Li, Faxin, Dong, Shuxiang
Formato: Artigo
Idioma:Inglês
Publicado em: John Wiley and Sons Inc. 2020
Assuntos:
Acesso em linha:https://ncbi.nlm.nih.gov/pmc/articles/PMC7507555/
https://ncbi.nlm.nih.gov/pubmed/32999819
https://ncbi.nlm.nih.govhttp://dx.doi.org/10.1002/advs.202001368
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