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Calculation Theory of Nonuniform Distribution in Cleanroom
Due to the nonuniform distributions of airflow and dust particles, particles in cleanroom are actually not evenly distributed. This chapter will focus on the calculation theory of three-zone nonuniform distribution.
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| 出版年: | Fundamentals of Air Cleaning Technology and Its Application in Cleanrooms |
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| 第一著者: | |
| フォーマット: | Artigo |
| 言語: | Inglês |
| 出版事項: |
2013
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| 主題: | |
| オンライン･アクセス: | https://ncbi.nlm.nih.gov/pmc/articles/PMC7498884/ https://ncbi.nlm.nih.govhttp://dx.doi.org/10.1007/978-3-642-39374-7_11 |
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