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Calculation Theory of Nonuniform Distribution in Cleanroom

Due to the nonuniform distributions of airflow and dust particles, particles in cleanroom are actually not evenly distributed. This chapter will focus on the calculation theory of three-zone nonuniform distribution.

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Bibliografiske detaljer
Udgivet i:Fundamentals of Air Cleaning Technology and Its Application in Cleanrooms
Hovedforfatter: Xu, Zhonglin
Format: Artigo
Sprog:Inglês
Udgivet: 2013
Fag:
Online adgang:https://ncbi.nlm.nih.gov/pmc/articles/PMC7498884/
https://ncbi.nlm.nih.govhttp://dx.doi.org/10.1007/978-3-642-39374-7_11
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