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Combined Ammonia and Electron Processing of a Carbon-Rich Ruthenium Nanomaterial Fabricated by Electron-Induced Deposition
Ammonia (NH(3))-assisted purification of deposits fabricated by focused electron beam-induced deposition (FEBID) has recently been proven successful for the removal of halide contaminations. Herein, we demonstrate the impact of combined NH(3) and electron processing on FEBID deposits containing hydr...
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| Yayımlandı: | Micromachines (Basel) |
|---|---|
| Asıl Yazarlar: | , , , , |
| Materyal Türü: | Artigo |
| Dil: | Inglês |
| Baskı/Yayın Bilgisi: |
MDPI
2020
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| Konular: | |
| Online Erişim: | https://ncbi.nlm.nih.gov/pmc/articles/PMC7466110/ https://ncbi.nlm.nih.gov/pubmed/32806527 https://ncbi.nlm.nih.govhttp://dx.doi.org/10.3390/mi11080769 |
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