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Effect of the Lapping Platen Groove Density on the Characteristics of Microabrasive-Based Lapping
Microabrasive-based lapping is widely used in the manufacturing of single-crystal substrates such as sapphire, SiC, and GaN. Although many studies have been conducted to improve the lapping process characteristics, most of them focused on process conditions or consumables. In this study, the effect...
Guardat en:
| Publicat a: | Micromachines (Basel) |
|---|---|
| Autors principals: | , , , , |
| Format: | Artigo |
| Idioma: | Inglês |
| Publicat: |
MDPI
2020
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| Matèries: | |
| Accés en línia: | https://ncbi.nlm.nih.gov/pmc/articles/PMC7463435/ https://ncbi.nlm.nih.gov/pubmed/32823978 https://ncbi.nlm.nih.govhttp://dx.doi.org/10.3390/mi11080775 |
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