Boundary-directed epitaxy of block copolymers

Directed self-assembly of block copolymers (BCPs) enables nanofabrication at sub-10 nm dimensions, beyond the resolution of conventional lithography. However, directing the position, orientation, and long-range lateral order of BCP domains to produce technologically-useful patterns is a challenge. H...

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Detalhes bibliográficos
Publicado no:Nat Commun
Main Authors: Jacobberger, Robert M., Thapar, Vikram, Wu, Guang-Peng, Chang, Tzu-Hsuan, Saraswat, Vivek, Way, Austin J., Jinkins, Katherine R., Ma, Zhenqiang, Nealey, Paul F., Hur, Su-Mi, Xiong, Shisheng, Arnold, Michael S.
Formato: Artigo
Idioma:Inglês
Publicado em: Nature Publishing Group UK 2020
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Article
Acesso em linha:https://ncbi.nlm.nih.gov/pmc/articles/PMC7438520/
https://ncbi.nlm.nih.gov/pubmed/32814775
https://ncbi.nlm.nih.govhttp://dx.doi.org/10.1038/s41467-020-17938-3
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