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Design and fabrication of an electrohydrodynamically actuated microlens with areal density modulated electrodes
In this paper, we introduce an electrode design for electrohydrodynamically actuated liquid microlenses. The effective electrode areal density radially increases which results in centering of the liquid tunable microlens with a planar device structure. A model was developed to demonstrate the center...
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| Pubblicato in: | J Micromech Microeng |
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| Autori principali: | , |
| Natura: | Artigo |
| Lingua: | Inglês |
| Pubblicazione: |
2015
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| Soggetti: | |
| Accesso online: | https://ncbi.nlm.nih.gov/pmc/articles/PMC7413298/ https://ncbi.nlm.nih.gov/pubmed/32773966 https://ncbi.nlm.nih.govhttp://dx.doi.org/10.1088/0960-1317/26/1/015004 |
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