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Plasma-Assisted Chemical Vapor Deposition of F-Doped MnO(2) Nanostructures on Single Crystal Substrates
MnO(2) nanostructures were fabricated by plasma assisted-chemical vapor deposition (PA-CVD) using a fluorinated diketonate diamine manganese complex, acting as single-source precursor for both Mn and F. The syntheses were performed from Ar/O(2) plasmas on MgAl(2)O(4)(100), YAlO(3)(010), and Y(3)Al(5...
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| Publicado no: | Nanomaterials (Basel) |
|---|---|
| Main Authors: | , , , , , |
| Formato: | Artigo |
| Idioma: | Inglês |
| Publicado em: |
MDPI
2020
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| Assuntos: | |
| Acesso em linha: | https://ncbi.nlm.nih.gov/pmc/articles/PMC7407531/ https://ncbi.nlm.nih.gov/pubmed/32650613 https://ncbi.nlm.nih.govhttp://dx.doi.org/10.3390/nano10071335 |
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