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Metallic glass coating for improving diamond dicing performance
This is the first report on the coating of diamond dicing blades with metallic glass (MG) coating to reduce chipping when used to cut Si, SiC, sapphire, and patterned sapphire substrates (PSS). The low coefficient-of-friction (CoF) of Zr-based MG-coated dicing blades was shown to reduce the number a...
Shranjeno v:
| izdano v: | Sci Rep |
|---|---|
| Main Authors: | , , , , |
| Format: | Artigo |
| Jezik: | Inglês |
| Izdano: |
Nature Publishing Group UK
2020
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| Teme: | |
| Online dostop: | https://ncbi.nlm.nih.gov/pmc/articles/PMC7381673/ https://ncbi.nlm.nih.gov/pubmed/32709992 https://ncbi.nlm.nih.govhttp://dx.doi.org/10.1038/s41598-020-69399-9 |
| Oznake: |
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