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A Capacitive MEMS Inclinometer Sensor with Wide Dynamic Range and Improved Sensitivity
This paper proposes a novel capacitive liquid metal microelectromechanical system (MEMS) inclinometer sensor and introduces its design, fabrication, and signal measurement. The sensor was constructed using three-layer substrates. A conductive liquid droplet was rolled along an annular groove of the...
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| Publicado no: | Sensors (Basel) |
|---|---|
| Main Authors: | , , , |
| Formato: | Artigo |
| Idioma: | Inglês |
| Publicado em: |
MDPI
2020
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| Assuntos: | |
| Acesso em linha: | https://ncbi.nlm.nih.gov/pmc/articles/PMC7374376/ https://ncbi.nlm.nih.gov/pubmed/32630795 https://ncbi.nlm.nih.govhttp://dx.doi.org/10.3390/s20133711 |
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