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Characterization and Analysis of Metal Adhesion to Parylene Polymer Substrate Using Scotch Tape Test for Peripheral Neural Probe

This paper presents measurement and FEM (Finite Element Method) analysis of metal adhesion force to a parylene substrate for implantable neural probe. A test device composed of 300 nm-thick gold and 30 nm-thick titanium metal electrodes on top of parylene substrate was prepared. The metal electrodes...

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Detalhes bibliográficos
Publicado no:Micromachines (Basel)
Main Authors: Seok, Seonho, Park, HyungDal, Kim, Jinseok
Formato: Artigo
Idioma:Inglês
Publicado em: MDPI 2020
Assuntos:
Acesso em linha:https://ncbi.nlm.nih.gov/pmc/articles/PMC7345729/
https://ncbi.nlm.nih.gov/pubmed/32580430
https://ncbi.nlm.nih.govhttp://dx.doi.org/10.3390/mi11060605
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