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Microfabrication of X-ray Optics by Metal Assisted Chemical Etching: A Review
High-aspect-ratio silicon micro- and nanostructures are technologically relevant in several applications, such as microelectronics, microelectromechanical systems, sensors, thermoelectric materials, battery anodes, solar cells, photonic devices, and X-ray optics. Microfabrication is usually achieved...
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| Udgivet i: | Micromachines (Basel) |
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| Main Authors: | , |
| Format: | Artigo |
| Sprog: | Inglês |
| Udgivet: |
MDPI
2020
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| Fag: | |
| Online adgang: | https://ncbi.nlm.nih.gov/pmc/articles/PMC7344591/ https://ncbi.nlm.nih.gov/pubmed/32545633 https://ncbi.nlm.nih.govhttp://dx.doi.org/10.3390/mi11060589 |
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