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Output of MEMS Piezoelectric Energy Harvester of Double-Clamped Beams with Different Width Shapes
For a microelectromechanical system (MEMS) piezoelectric energy harvester consisting of double-clamped beams, the effects of both beam shape and electrode arrangement on the voltage outputs are analyzed. For two kinds of harvester structures including millimeter-scale and micro-scale, and different...
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| Veröffentlicht in: | Materials (Basel) |
|---|---|
| Hauptverfasser: | , , , |
| Format: | Artigo |
| Sprache: | Inglês |
| Veröffentlicht: |
MDPI
2020
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| Schlagworte: | |
| Online Zugang: | https://ncbi.nlm.nih.gov/pmc/articles/PMC7287982/ https://ncbi.nlm.nih.gov/pubmed/32438668 https://ncbi.nlm.nih.govhttp://dx.doi.org/10.3390/ma13102330 |
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