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3D Printed MEMS Technology—Recent Developments and Applications

Microelectromechanical systems (MEMS) are of high interest for recent electronic applications. Their applications range from medicine to measurement technology, from microfluidics to the Internet of Things (IoT). In many cases, MEMS elements serve as sensors or actuators, e.g., in recent mobile phon...

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Detalhes bibliográficos
Publicado no:Micromachines (Basel)
Main Authors: Blachowicz, Tomasz, Ehrmann, Andrea
Formato: Artigo
Idioma:Inglês
Publicado em: MDPI 2020
Assuntos:
Acesso em linha:https://ncbi.nlm.nih.gov/pmc/articles/PMC7231376/
https://ncbi.nlm.nih.gov/pubmed/32326136
https://ncbi.nlm.nih.govhttp://dx.doi.org/10.3390/mi11040434
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