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Structure evolution during deposition and thermal annealing of amorphous carbon ultrathin films investigated by molecular dynamics simulations

The evolution of the structure of amorphous carbon (a-C) films during deposition and thermal annealing is of significant interest from both the materials science and application perspectives. However, despite the voluminous literature of studies dealing with the deposition and physical properties of...

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Vydáno v:Sci Rep
Hlavní autoři: Wang, Shengxi, Komvopoulos, Kyriakos
Médium: Artigo
Jazyk:Inglês
Vydáno: Nature Publishing Group UK 2020
Témata:
On-line přístup:https://ncbi.nlm.nih.gov/pmc/articles/PMC7229151/
https://ncbi.nlm.nih.gov/pubmed/32415158
https://ncbi.nlm.nih.govhttp://dx.doi.org/10.1038/s41598-020-64625-w
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