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Microscopic sensors using optical wireless integrated circuits
We present a platform for parallel production of standalone, untethered electronic sensors that are truly microscopic, i.e., smaller than the resolution of the naked eye. This platform heterogeneously integrates silicon electronics and inorganic microlight emitting diodes (LEDs) into a 100-μm-scale...
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| I publikationen: | Proc Natl Acad Sci U S A |
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| Huvudupphovsmän: | , , , , , , , , , , , , , |
| Materialtyp: | Artigo |
| Språk: | Inglês |
| Publicerad: |
National Academy of Sciences
2020
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| Ämnen: | |
| Länkar: | https://ncbi.nlm.nih.gov/pmc/articles/PMC7196798/ https://ncbi.nlm.nih.gov/pubmed/32303653 https://ncbi.nlm.nih.govhttp://dx.doi.org/10.1073/pnas.1919677117 |
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