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Characterization of Platinum-Based Thin Films Deposited by Thermionic Vacuum Arc (TVA) Method
The current work aimed to characterize the morphology, chemical, and mechanical properties of Pt and PtTi thin films deposited via thermionic vacuum arc (TVA) method on glass and silicon substrates. The deposited thin films were characterized by means of a scanning electron microscope technique (SEM...
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| Published in: | Materials (Basel) |
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| Main Authors: | , , , , , |
| Format: | Artigo |
| Language: | Inglês |
| Published: |
MDPI
2020
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| Subjects: | |
| Online Access: | https://ncbi.nlm.nih.gov/pmc/articles/PMC7179031/ https://ncbi.nlm.nih.gov/pubmed/32290226 https://ncbi.nlm.nih.govhttp://dx.doi.org/10.3390/ma13071796 |
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