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Thin-Film Engineering of Mechanical Fragmentation Properties of Atomic-Layer-Deposited Metal Oxides
Mechanical fracture properties were studied for the common atomic-layer-deposited Al(2)O(3), ZnO, TiO(2), ZrO(2), and Y(2)O(3) thin films, and selected multilayer combinations via uniaxial tensile testing and Weibull statistics. The crack onset strains and interfacial shear strains were studied, and...
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| 出版年: | Nanomaterials (Basel) |
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| 主要な著者: | , , , , , , , , , |
| フォーマット: | Artigo |
| 言語: | Inglês |
| 出版事項: |
MDPI
2020
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| 主題: | |
| オンライン･アクセス: | https://ncbi.nlm.nih.gov/pmc/articles/PMC7153380/ https://ncbi.nlm.nih.gov/pubmed/32204547 https://ncbi.nlm.nih.govhttp://dx.doi.org/10.3390/nano10030558 |
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