Volume Fabrication of Quantum Cascade Lasers on 200 mm-CMOS pilot line

The manufacturing cost of quantum cascade lasers is still a major bottleneck for the adoption of this technology for chemical sensing. The integration of Mid-Infrared sources on Si substrate based on CMOS technology paves the way for high-volume low-cost fabrication. Furthermore, the use of Si-based...

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發表在:Sci Rep
Main Authors: Coutard, J. G, Brun, M., Fournier, M., Lartigue, O., Fedeli, F., Maisons, G., Fedeli, J. M, Nicoletti, S., Carras, M., Duraffourg, L.
格式: Artigo
語言:Inglês
出版: Nature Publishing Group UK 2020
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Article
在線閱讀:https://ncbi.nlm.nih.gov/pmc/articles/PMC7148313/
https://ncbi.nlm.nih.gov/pubmed/32277096
https://ncbi.nlm.nih.govhttp://dx.doi.org/10.1038/s41598-020-63106-4
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