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Volume Fabrication of Quantum Cascade Lasers on 200 mm-CMOS pilot line
The manufacturing cost of quantum cascade lasers is still a major bottleneck for the adoption of this technology for chemical sensing. The integration of Mid-Infrared sources on Si substrate based on CMOS technology paves the way for high-volume low-cost fabrication. Furthermore, the use of Si-based...
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| 出版年: | Sci Rep |
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| 主要な著者: | , , , , , , , , , |
| フォーマット: | Artigo |
| 言語: | Inglês |
| 出版事項: |
Nature Publishing Group UK
2020
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| 主題: | |
| オンライン･アクセス: | https://ncbi.nlm.nih.gov/pmc/articles/PMC7148313/ https://ncbi.nlm.nih.gov/pubmed/32277096 https://ncbi.nlm.nih.govhttp://dx.doi.org/10.1038/s41598-020-63106-4 |
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