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Design and Verification of Humidity Sensors Based on Magnesium Oxide Micro-Arc Oxidation Film Layers
Humidity detection range is an important indicator for measuring the performance of humidity sensors, but semiconductor humidity sensors often face the problems of narrow detection ranges and insufficient detection sensitivities. In this paper, a magnesium oxide (MgO) humidity sensor based on micro-...
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| Veröffentlicht in: | Sensors (Basel) |
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| Hauptverfasser: | , , , , |
| Format: | Artigo |
| Sprache: | Inglês |
| Veröffentlicht: |
MDPI
2020
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| Schlagworte: | |
| Online Zugang: | https://ncbi.nlm.nih.gov/pmc/articles/PMC7146567/ https://ncbi.nlm.nih.gov/pubmed/32244991 https://ncbi.nlm.nih.govhttp://dx.doi.org/10.3390/s20061736 |
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