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Ionization Gas Sensor Using Suspended Carbon Nanotube Beams
An ionization sensor based on suspended carbon nanotubes (CNTs) was presented. A suspended CNT beam was fabricated by a low-temperature surface micromachining process using SU8 photoresist as the sacrificial layer. Application of a bias to the CNT beam generated very high non-linear electric fields...
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| Publicado no: | Sensors (Basel) |
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| Main Authors: | , , |
| Formato: | Artigo |
| Idioma: | Inglês |
| Publicado em: |
MDPI
2020
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| Assuntos: | |
| Acesso em linha: | https://ncbi.nlm.nih.gov/pmc/articles/PMC7146359/ https://ncbi.nlm.nih.gov/pubmed/32192059 https://ncbi.nlm.nih.govhttp://dx.doi.org/10.3390/s20061660 |
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