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Fabrication of MEMS Directional Acoustic Sensors for Underwater Operation
In this work, microelectromechanical systems (MEMS)-based directional acoustic sensors operating in an underwater environment are explored. The studied sensors consist of a free-standing single wing or two wings pivoted to a substrate. The sensors operate in a narrow frequency band determined by the...
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| Gepubliceerd in: | Sensors (Basel) |
|---|---|
| Hoofdauteurs: | , , , , |
| Formaat: | Artigo |
| Taal: | Inglês |
| Gepubliceerd in: |
MDPI
2020
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| Onderwerpen: | |
| Online toegang: | https://ncbi.nlm.nih.gov/pmc/articles/PMC7085756/ https://ncbi.nlm.nih.gov/pubmed/32106454 https://ncbi.nlm.nih.govhttp://dx.doi.org/10.3390/s20051245 |
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