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Plasma Fabrication and SERS Functionality of Gold Crowned Silicon Submicrometer Pillars

Sequential plasma processes combined with specific lithographic methods allow for the fabrication of advanced material structures. In the present work, we used self-assembled colloidal monolayers as lithographic structures for the conformation of ordered Si submicrometer pillars by reactive ion etch...

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Bibliografske podrobnosti
izdano v:Materials (Basel)
Main Authors: Pellacani, Paola, Morasso, Carlo, Picciolini, Silvia, Gallach, Dario, Fornasari, Lucia, Marabelli, Franco, Manso Silvan, Miguel
Format: Artigo
Jezik:Inglês
Izdano: MDPI 2020
Teme:
Online dostop:https://ncbi.nlm.nih.gov/pmc/articles/PMC7085028/
https://ncbi.nlm.nih.gov/pubmed/32164146
https://ncbi.nlm.nih.govhttp://dx.doi.org/10.3390/ma13051244
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