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Experimental Characterization of an Embossed Capacitive Micromachined Ultrasonic Transducer Cell

Capacitive Micromachined Ultrasonic Transducer (CMUT) is a promising ultrasonic transducer in medical diagnosis and therapeutic applications that demand a high output pressure. The concept of a CMUT with an annular embossed pattern on a membrane working in collapse mode is proposed to further improv...

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Detalhes bibliográficos
Publicado no:Micromachines (Basel)
Main Authors: Yu, Yuanyu, Wang, Jiujiang, Liu, Xin, Pun, Sio Hang, Zhang, Shuang, Cheng, Ching-Hsiang, Lei, Kin Fong, Vai, Mang I, Mak, Peng Un
Formato: Artigo
Idioma:Inglês
Publicado em: MDPI 2020
Assuntos:
Acesso em linha:https://ncbi.nlm.nih.gov/pmc/articles/PMC7074606/
https://ncbi.nlm.nih.gov/pubmed/32093303
https://ncbi.nlm.nih.govhttp://dx.doi.org/10.3390/mi11020217
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