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Highly Sensitive Photoacoustic Microcavity Gas Sensor for Leak Detection

A highly sensitive photoacoustic (PA) microcavity gas sensor for leak detection is proposed. The miniature and low-cost gas sensor mainly consisted of a micro-electro-mechanical system (MEMS) microphone and a stainless-steel capillary with two small holes opened on the side wall. Different from trad...

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Detalhes bibliográficos
Publicado no:Sensors (Basel)
Main Authors: Chen, Ke, Chen, Yewei, Zhang, Bo, Mei, Liang, Guo, Min, Deng, Hong, Liu, Shuai, Ma, Fengxiang, Gong, Zhenfeng, Yu, Qingxu
Formato: Artigo
Idioma:Inglês
Publicado em: MDPI 2020
Assuntos:
Acesso em linha:https://ncbi.nlm.nih.gov/pmc/articles/PMC7070655/
https://ncbi.nlm.nih.gov/pubmed/32093237
https://ncbi.nlm.nih.govhttp://dx.doi.org/10.3390/s20041164
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