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Anti-Symmetric Mode Vibration of Electrostatically Actuated Clamped–Clamped Microbeams for Mass Sensing
This paper details study of the anti-symmetric response to the symmetrical electrostatic excitation of a Micro-electro-mechanical-systems (MEMS) resonant mass sensor. Under higher order mode excitation, two nonlinear coupled flexural modes to describe MEMS mass sensors are obtained by using Hamilton...
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| Publicado en: | Micromachines (Basel) |
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| Main Authors: | , , , , |
| Formato: | Artigo |
| Idioma: | Inglês |
| Publicado: |
MDPI
2019
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| Assuntos: | |
| Acceso en liña: | https://ncbi.nlm.nih.gov/pmc/articles/PMC7020076/ https://ncbi.nlm.nih.gov/pubmed/31861694 https://ncbi.nlm.nih.govhttp://dx.doi.org/10.3390/mi11010012 |
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