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A MEMS-Based Multi-Parameter Integrated Chip and Its Portable System for Water Quality Detection

As an important means to protect water resources, water quality detection is of great social and economic significance. Water quality detection sensors processed by micro-electro-mechanical system (MEMS) technology have the advantages of low-cost, small size, and high sensitivity. In this paper, a m...

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Detalhes bibliográficos
Publicado no:Micromachines (Basel)
Main Authors: Wu, Ziyue, Wang, Jiaqi, Bian, Chao, Tong, Jianhua, Xia, Shanhong
Formato: Artigo
Idioma:Inglês
Publicado em: MDPI 2020
Assuntos:
Acesso em linha:https://ncbi.nlm.nih.gov/pmc/articles/PMC7019632/
https://ncbi.nlm.nih.gov/pubmed/31948112
https://ncbi.nlm.nih.govhttp://dx.doi.org/10.3390/mi11010063
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