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Development Trends and Perspectives of Future Sensors and MEMS/NEMS

With the fast development of the fifth-generation cellular network technology (5G), the future sensors and microelectromechanical systems (MEMS)/nanoelectromechanical systems (NEMS) are presenting a more and more critical role to provide information in our daily life. This review paper introduces th...

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Detalhes bibliográficos
Publicado no:Micromachines (Basel)
Main Authors: Zhu, Jianxiong, Liu, Xinmiao, Shi, Qiongfeng, He, Tianyiyi, Sun, Zhongda, Guo, Xinge, Liu, Weixin, Sulaiman, Othman Bin, Dong, Bowei, Lee, Chengkuo
Formato: Artigo
Idioma:Inglês
Publicado em: MDPI 2019
Assuntos:
Acesso em linha:https://ncbi.nlm.nih.gov/pmc/articles/PMC7019281/
https://ncbi.nlm.nih.gov/pubmed/31861476
https://ncbi.nlm.nih.govhttp://dx.doi.org/10.3390/mi11010007
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