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Integrated Piezoelectric AlN Thin Film with SU-8/PDMS Supporting Layer for Flexible Sensor Array
This research focuses on the development of a flexible tactile sensor array consisting of aluminum nitride (AlN) based on micro-electro-mechanical system (MEMS) technology. A total of 2304 tactile sensors were integrated into a small area of 2.5 × 2.5 cm(2). Five hundred nm thick AlN film with stron...
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| Gepubliceerd in: | Sensors (Basel) |
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| Hoofdauteurs: | , , , , |
| Formaat: | Artigo |
| Taal: | Inglês |
| Gepubliceerd in: |
MDPI
2020
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| Onderwerpen: | |
| Online toegang: | https://ncbi.nlm.nih.gov/pmc/articles/PMC6982933/ https://ncbi.nlm.nih.gov/pubmed/31935913 https://ncbi.nlm.nih.govhttp://dx.doi.org/10.3390/s20010315 |
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