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Influence of Post-UV/Ozone Treatment of Ultrasonic-Sprayed Zirconium Oxide Dielectric Films for a Low-Temperature Oxide Thin Film Transistor
Solution-processed metal oxides require a great deal of thermal budget in order to achieve the desired film properties. Here, we show that the deposition temperature of sprayed zirconium oxide (ZrO(x)) thin film can be lowered by exposing the film surface to an ultraviolet (UV) ozone treatment at ro...
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| Publicat a: | Materials (Basel) |
|---|---|
| Autors principals: | , , , , , , |
| Format: | Artigo |
| Idioma: | Inglês |
| Publicat: |
MDPI
2019
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| Matèries: | |
| Accés en línia: | https://ncbi.nlm.nih.gov/pmc/articles/PMC6981653/ https://ncbi.nlm.nih.gov/pubmed/31861357 https://ncbi.nlm.nih.govhttp://dx.doi.org/10.3390/ma13010006 |
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