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Optical Sensors for Multi-Axis Angle and Displacement Measurement Using Grating Reflectors
In dimensional metrology it is necessary to carry out multi-axis angle and displacement measurement for high-precision positioning. Although the state-of-the-art linear displacement sensors have sub-nanometric measurement resolution, it is not easy to suppress the increase of measurement uncertainty...
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| Publicado no: | Sensors (Basel) |
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| Main Authors: | , , |
| Formato: | Artigo |
| Idioma: | Inglês |
| Publicado em: |
MDPI
2019
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| Assuntos: | |
| Acesso em linha: | https://ncbi.nlm.nih.gov/pmc/articles/PMC6928657/ https://ncbi.nlm.nih.gov/pubmed/31805630 https://ncbi.nlm.nih.govhttp://dx.doi.org/10.3390/s19235289 |
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