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Predicting strength distributions of MEMS structures using flaw size and spatial density
The populations of flaws in individual layers of microelectromechanical systems (MEMS) structures are determined and verified using a combination of specialized specimen geometry, recent probabilistic analysis, and topographic mapping. Strength distributions of notched and tensile bar specimens are...
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| Publicado no: | Microsyst Nanoeng |
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| Main Authors: | , , |
| Formato: | Artigo |
| Idioma: | Inglês |
| Publicado em: |
Nature Publishing Group UK
2019
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| Assuntos: | |
| Acesso em linha: | https://ncbi.nlm.nih.gov/pmc/articles/PMC6826048/ https://ncbi.nlm.nih.gov/pubmed/31700670 https://ncbi.nlm.nih.govhttp://dx.doi.org/10.1038/s41378-019-0093-y |
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