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Metasurface-generated complex 3-dimensional optical fields for interference lithography
Fast, large-scale, and robust 3-dimensional (3D) fabrication techniques for patterning a variety of structures with submicrometer resolution are important in many areas of science and technology such as photonics, electronics, and mechanics with a wide range of applications from tissue engineering t...
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| Publicado no: | Proc Natl Acad Sci U S A |
|---|---|
| Main Authors: | , , , |
| Formato: | Artigo |
| Idioma: | Inglês |
| Publicado em: |
National Academy of Sciences
2019
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| Assuntos: | |
| Acesso em linha: | https://ncbi.nlm.nih.gov/pmc/articles/PMC6815187/ https://ncbi.nlm.nih.gov/pubmed/31591229 https://ncbi.nlm.nih.govhttp://dx.doi.org/10.1073/pnas.1908382116 |
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