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A Sensitive and Versatile Thickness Determination Method Based on Non-Inflection Terahertz Property Fitting

The accuracy of thin-film characterization in terahertz spectroscopy is mainly set by the thickness uncertainty. Physical thickness measurement has limited accuracy for thin-film samples thinner than a few hundreds of micrometers and is sometimes even impossible. The temporal resolution of time-doma...

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Detalhes bibliográficos
Publicado no:Sensors (Basel)
Main Authors: Chen, Xuequan, Pickwell-MacPherson, Emma
Formato: Artigo
Idioma:Inglês
Publicado em: MDPI 2019
Assuntos:
Acesso em linha:https://ncbi.nlm.nih.gov/pmc/articles/PMC6806189/
https://ncbi.nlm.nih.gov/pubmed/31547626
https://ncbi.nlm.nih.govhttp://dx.doi.org/10.3390/s19194118
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