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On-Chip Non-Dispersive Infrared CO(2) Sensor Based on an Integrating Cylinder †
In this paper, we propose a novel, miniaturized non-dispersive infrared (NDIR) CO(2) sensor implemented on a silicon chip. The sensor has a simple structure, consisting of a hollow metallic cylindrical cavity along with access waveguides. A detailed analysis of the proposed sensor is presented. Simu...
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| Pubblicato in: | Sensors (Basel) |
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| Autori principali: | , , , |
| Natura: | Artigo |
| Lingua: | Inglês |
| Pubblicazione: |
MDPI
2019
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| Soggetti: | |
| Accesso online: | https://ncbi.nlm.nih.gov/pmc/articles/PMC6806095/ https://ncbi.nlm.nih.gov/pubmed/31575053 https://ncbi.nlm.nih.govhttp://dx.doi.org/10.3390/s19194260 |
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