Kinetics and Chemistry of Hydrolysis of Ultrathin, Thermally Grown Layers of Silicon Oxide as Biofluid Barriers in Flexible Electronic Systems

Flexible electronic systems for bioimplants that offer long-term (multidecade) stability and safety in operation require thin, biocompatible layers that can prevent biofluid penetration. Recent work shows that ultrathin films of silicon dioxide thermally grown (TG-SiO(2)) on device-grade silicon waf...

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Detalhes bibliográficos
Publicado no:ACS Appl Mater Interfaces
Main Authors: Lee, Yoon Kyeung, Yu, Ki Jun, Kim, Yerim, Yoon, Younghee, Xie, Zhaoqian, Song, Enming, Luan, Haiwen, Feng, Xue, Huang, Yonggang, Rogers, John A.
Formato: Artigo
Idioma:Inglês
Publicado em: 2017
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Article
Acesso em linha:https://ncbi.nlm.nih.gov/pmc/articles/PMC6800003/
https://ncbi.nlm.nih.gov/pubmed/29178781
https://ncbi.nlm.nih.govhttp://dx.doi.org/10.1021/acsami.7b15302
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