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Pyrolysis-induced shrinking of three-dimensional structures fabricated by two-photon polymerization: experiment and theoretical model

The introduction of two-photon polymerization (TPP) into the area of Carbon Micro Electromechanical Systems (C-MEMS) has enabled the fabrication of three-dimensional glassy carbon nanostructures with geometries previously unattainable through conventional UV lithography. Pyrolysis of TPP structures...

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Detalhes bibliográficos
Publicado no:Microsyst Nanoeng
Main Authors: Cardenas-Benitez, Braulio, Eschenbaum, Carsten, Mager, Dario, Korvink, Jan G., Madou, Marc J., Lemmer, Uli, Leon, Israel De, Martinez-Chapa, Sergio O.
Formato: Artigo
Idioma:Inglês
Publicado em: Nature Publishing Group UK 2019
Assuntos:
Acesso em linha:https://ncbi.nlm.nih.gov/pmc/articles/PMC6799819/
https://ncbi.nlm.nih.gov/pubmed/31636928
https://ncbi.nlm.nih.govhttp://dx.doi.org/10.1038/s41378-019-0079-9
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