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A Review: Preparation, Performance, and Applications of Silicon Oxynitride Film
Silicon oxynitride (SiN(x)O(y)) is a highly promising functional material for its luminescence performance and tunable refractive index, which has wide applications in optical devices, non-volatile memory, barrier layer, and scratch-resistant coatings. This review presents recent developments, and d...
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| Pubblicato in: | Micromachines (Basel) |
|---|---|
| Autori principali: | , , , , , |
| Natura: | Artigo |
| Lingua: | Inglês |
| Pubblicazione: |
MDPI
2019
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| Soggetti: | |
| Accesso online: | https://ncbi.nlm.nih.gov/pmc/articles/PMC6723468/ https://ncbi.nlm.nih.gov/pubmed/31434246 https://ncbi.nlm.nih.govhttp://dx.doi.org/10.3390/mi10080552 |
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