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Development of a High Stability Pd-Ni Alloy Thin-Film Coated SAW Device for Sensing Hydrogen
A Pd-Ni alloy thin-film coated surface acoustic wave (SAW) device is proposed for sensing hydrogen. The Pd-Ni thin-film was sputtered onto the SAW propagation path of a SAW device with a delay line pattern to build the chip-sized hydrogen sensor. The prepared sensor chip was characterized by employi...
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| Publicado no: | Sensors (Basel) |
|---|---|
| Main Authors: | , , , , , |
| Formato: | Artigo |
| Idioma: | Inglês |
| Publicado em: |
MDPI
2019
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| Assuntos: | |
| Acesso em linha: | https://ncbi.nlm.nih.gov/pmc/articles/PMC6721225/ https://ncbi.nlm.nih.gov/pubmed/31443271 https://ncbi.nlm.nih.govhttp://dx.doi.org/10.3390/s19163560 |
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