Loading...

Annihilating Pores in the Desired Layer of a Porous Silicon Bilayer with Different Porosities for Layer Transfer

A silicon layer that is tens of micrometers thick on a handle substrate is desired for applications involving power devices, microelectromechanical systems (MEMS), highly efficient silicon solar cells (<50 µm), etc. In general, if the initial silicon layer obtained from the layer transfer process...

Full description

Saved in:
Bibliographic Details
Published in:Sci Rep
Main Authors: Chiang, C.-C., Lee, Benjamin T.-H.
Format: Artigo
Language:Inglês
Published: Nature Publishing Group UK 2019
Subjects:
Online Access:https://ncbi.nlm.nih.gov/pmc/articles/PMC6718624/
https://ncbi.nlm.nih.gov/pubmed/31477773
https://ncbi.nlm.nih.govhttp://dx.doi.org/10.1038/s41598-019-49119-8
Tags: Add Tag
No Tags, Be the first to tag this record!