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MEMS 3D Scan Mirror with SU-8 Membrane and Flexures for High NA Microscopy
We demonstrate a MEMS beam scanner capable of biaxial scanning with simultaneous focus control, for integration into a handheld confocal microscope for skin imaging. The device is based on a dual axis gimbal structure with an integrated largestroke deformable mirror. SU-8 polymer is used to construc...
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| Gepubliceerd in: | J Microelectromech Syst |
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| Hoofdauteurs: | , , , |
| Formaat: | Artigo |
| Taal: | Inglês |
| Gepubliceerd in: |
2018
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| Onderwerpen: | |
| Online toegang: | https://ncbi.nlm.nih.gov/pmc/articles/PMC6709994/ https://ncbi.nlm.nih.gov/pubmed/31452581 https://ncbi.nlm.nih.govhttp://dx.doi.org/10.1109/JMEMS.2018.2845375 |
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