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Back-Side Polymer-Coated Solid-State Nanopore Sensors

[Image: see text] We systematically investigated the influence of polymer coating on temporal resolution of solid-state nanopores. We fabricated a Si(3)N(4) nanopore integrated with a polyimide sheet partially covering the substrate surface. Upon detecting the nanoparticles dispersed in an electroly...

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Detalhes bibliográficos
Publicado no:ACS Omega
Main Authors: Leong, Iat Wai, Tsutsui, Makusu, Nakada, Tomoko, Taniguchi, Masateru, Washio, Takashi, Kawai, Tomoji
Formato: Artigo
Idioma:Inglês
Publicado em: American Chemical Society 2019
Acesso em linha:https://ncbi.nlm.nih.gov/pmc/articles/PMC6682124/
https://ncbi.nlm.nih.gov/pubmed/31460376
https://ncbi.nlm.nih.govhttp://dx.doi.org/10.1021/acsomega.9b00946
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