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Design and Performance of a J Band MEMS Switch

This paper presents a novel J band (220–325 GHz) MEMS switch design. The equivalent circuits, the major parameters, capacitance, inductance and resistance in the circuit were extracted and calculated quantitatively to carry out the radio frequency analysis. In addition, the mechanical property of th...

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Detalhes bibliográficos
Publicado no:Micromachines (Basel)
Main Authors: Zhang, Naibo, Yan, Ze, Song, Ruiliang, Wang, Chunting, Guo, Qiuquan, Yang, Jun
Formato: Artigo
Idioma:Inglês
Publicado em: MDPI 2019
Assuntos:
Acesso em linha:https://ncbi.nlm.nih.gov/pmc/articles/PMC6681097/
https://ncbi.nlm.nih.gov/pubmed/31337033
https://ncbi.nlm.nih.govhttp://dx.doi.org/10.3390/mi10070467
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