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Design and Performance of a J Band MEMS Switch

This paper presents a novel J band (220–325 GHz) MEMS switch design. The equivalent circuits, the major parameters, capacitance, inductance and resistance in the circuit were extracted and calculated quantitatively to carry out the radio frequency analysis. In addition, the mechanical property of th...

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書目詳細資料
發表在:Micromachines (Basel)
Main Authors: Zhang, Naibo, Yan, Ze, Song, Ruiliang, Wang, Chunting, Guo, Qiuquan, Yang, Jun
格式: Artigo
語言:Inglês
出版: MDPI 2019
主題:
在線閱讀:https://ncbi.nlm.nih.gov/pmc/articles/PMC6681097/
https://ncbi.nlm.nih.gov/pubmed/31337033
https://ncbi.nlm.nih.govhttp://dx.doi.org/10.3390/mi10070467
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